Quentin Smets Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Quentin Smets returned 2 record(s).
| Number | Title |
|---|---|
| 1 | WS2 transistors on 300 mm wafers with BEOL compatibility |
| 2 | Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substrates |