Quentin Smets Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Quentin Smets returned 2 record(s).

Number	Title
1	WS2 transistors on 300 mm wafers with BEOL compatibility
2	Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substrates