Jaehun Ryu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jaehun Ryu returned 2 record(s).

Number	Title
1	Charge trapping characteristics of Au nanocrystals embedded in remote plasma atomic layer-deposited Al₂O₃ film as the tunnel and blocking oxides for nonvolatile memory applications
2	The Effects of Radio Frequency Plasma Power on Al₂O₃ Films Deposited at Room-Temperature by Remote Plasma Atomic Layer Deposition