Inductively coupled plasma sources from Plasma ALD, LLC.


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Neung-Hee Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Neung-Hee Lee returned 1 record(s).

NumberTitle
1Impacts of conduction band offset and border traps on Vth instability of gate recessed normally-off GaN MIS-HEMTs