Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Samuel J. Whiteley Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Samuel J. Whiteley returned 1 record(s).

NumberTitle
1Atomic layer deposition of titanium nitride for quantum circuits