Xiao-Hua Ma Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Xiao-Hua Ma returned 2 record(s).

Number	Title
1	Comparative study on nitridation and oxidation plasma interface treatment for AlGaN/GaN MIS-HEMTs with AlN gate dielectric
2	Comparative study on interface and bulk charges in AlGaN/GaN metal-insulator-semiconductor heterostructures with Al₂O₃, AlN, and Al₂O₃/AlN laminated dielectrics