Inductively coupled plasma sources from Plasma ALD, LLC.


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Hao-Ting Feng Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hao-Ting Feng returned 1 record(s).

NumberTitle
1Electrical and physical characteristics of high-k gated MOSFETs with in-situ H2O and O2 plasma formed interfacial layer