Zhi-Xuan Zhang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Zhi-Xuan Zhang returned 4 record(s).

Number	Title
1	Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy
2	Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers
3	Effect of plasma power on the structural properties of tin oxide prepared by plasma-enhanced atomic layer deposition
4	Chemical Reaction and Ion Bombardment Effects of Plasma Radicals on Optoelectrical Properties of SnO2 Thin Films via Atomic Layer Deposition