Inductively coupled plasma sources from Plasma ALD, LLC.


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Katrina A. Morgan Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Katrina A. Morgan returned 2 record(s).

NumberTitle
1The effect of atomic layer deposition temperature on switching properties of HfOx resistive RAM devices
2Forming-free resistive switching of tunable ZnO films grown by atomic layer deposition