Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Fabien Volpi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Fabien Volpi returned 2 record(s).

NumberTitle
1Aluminum nitride thin films deposited by hydrogen plasma enhanced and thermal atomic layer deposition
2PEALD ZrO2 Films Deposition on TiN and Si Substrates