Inductively coupled plasma sources from Plasma ALD, LLC.


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Sebastian Killge Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sebastian Killge returned 3 record(s).

NumberTitle
1High-aspect-ratio TSVs with thALD/PEALD tantalum-based barrier layer, thALD Ruthenium seed layer and subsequent copper electroplating
2In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition
3In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films