Sebastian Killge Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sebastian Killge returned 3 record(s).

Number	Title
1	High-aspect-ratio TSVs with thALD/PEALD tantalum-based barrier layer, thALD Ruthenium seed layer and subsequent copper electroplating
2	In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition
3	In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films