Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Chang-Sheng Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chang-Sheng Lee returned 1 record(s).

NumberTitle
1High-resolution, high-aspect-ratio iridium-nickel composite nanoimprint molds