Inductively coupled plasma sources from Plasma ALD, LLC.


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F.S. Aguirre-Tostado Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by F.S. Aguirre-Tostado returned 1 record(s).

NumberTitle
1ALD and PEALD deposition of HfO2 and its effects on the nature of oxygen vacancies