Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

G. D. Dyud’bin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by G. D. Dyud’bin returned 1 record(s).

NumberTitle
1A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition