Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Silvia Lenaerts Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Silvia Lenaerts returned 1 record(s).

NumberTitle
1Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing