Daekwon Joo Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Daekwon Joo returned 2 record(s).

Number	Title
1	Enhancement of the TiO2 Thin-Film Dielectric Constant Through Pretreatment of Ir Substrate
2	TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition