Inductively coupled plasma sources from Plasma ALD, LLC.


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Daekwon Joo Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Daekwon Joo returned 2 record(s).

NumberTitle
1Enhancement of the TiO2 Thin-Film Dielectric Constant Through Pretreatment of Ir Substrate
2TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition