Inductively coupled plasma sources from Plasma ALD, LLC.


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Heber Hernandez-Arriaga Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Heber Hernandez-Arriaga returned 1 record(s).

NumberTitle
1Correlation between ferroelectricity and ferroelectric orthorhombic phase of HfxZr1-xO2 thin films using synchrotron x-ray analysis