Inductively coupled plasma sources from Plasma ALD, LLC.


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Jan Ingo Flege Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jan Ingo Flege returned 2 record(s).

NumberTitle
1Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
2In situ real-time and ex situ spectroscopic analysis of Al2O3 films prepared by plasma enhanced atomic layer deposition