Inductively coupled plasma sources from Plasma ALD, LLC.


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A. Kemmeren Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by A. Kemmeren returned 2 record(s).

NumberTitle
1Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
2Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications