Mannho Cho Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mannho Cho returned 3 record(s).

Number	Title
1	Interfacial Self-Cleaning during PEALD HfO₂ Process on GaAs Using TDMAH/O₂ with Different (NH₄)₂S Cleaning Time
2	Composition, structure, and electrical characteristics of HfO₂ gate dielectrics grown using the remote- and direct-plasma atomic layer deposition methods
3	Characteristics of HfO₂ thin films grown by plasma atomic layer deposition