Inductively coupled plasma sources from Plasma ALD, LLC.


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Sergey Nesmelov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sergey Nesmelov returned 2 record(s).

NumberTitle
1Influence of infrared radiation on the electrical characteristics of the surface-barrier nanostructures based on MBE HgCdTe
2Electrical characterizations of MIS structures based on variable-gap n(p)-HgCdTe grown by MBE on Si(0 1 3) substrates