Inductively coupled plasma sources from Plasma ALD, LLC.


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Thomas Riedl Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Thomas Riedl returned 2 record(s).

NumberTitle
1Gas permeation barriers deposited by atmospheric pressure plasma enhanced atomic layer deposition
2Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier