Masaki Hirayama Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Masaki Hirayama returned 3 record(s).

Number	Title
1	Selective composition modification deposition utilizing ion bombardment-induced interfacial mixing during plasma-enhanced atomic layer deposition
2	Low-energy high-flux ion bombardment-induced interfacial mixing during Al₂O₃ plasma-enhanced atomic layer deposition
3	Control of ion-flux and ion-energy in direct inductively coupled plasma reactor for interfacial-mixing plasma-enhanced atomic layer deposition