Inductively coupled plasma sources from Plasma ALD, LLC.


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Jiadong Cheng Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jiadong Cheng returned 1 record(s).

NumberTitle
1Baking and plasma pretreatment of sapphire surfaces as a way to facilitate the epitaxial plasma-enhanced atomic layer deposition of GaN thin films