K.S. Agrawal Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by K.S. Agrawal returned 4 record(s).

Number	Title
1	Structural and electrical properties of ultra-thin high-k ZrO₂ film on nitride passivated Ge(100) prepared by PEALD
2	PEALD grown high-k ZrO₂ thin films on SiC group IV compound semiconductor
3	XPS study of homemade plasma enhanced atomic layer deposited La₂O₃/ZrO₂ bilayer thin films
4	Interfacial and electrical properties of Al₂O₃/HfO₂ bilayer deposited by atomic layer deposition on GeON passivated germanium surface