Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Jinsong Zhang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jinsong Zhang returned 2 record(s).

NumberTitle
1Plasma-enhanced atomic layer deposition of superconducting niobium nitride
2Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition