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Jaehyun Moon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jaehyun Moon returned 2 record(s).

NumberTitle
1All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process
2Fabrication of self-aligned TFTs with a ultra-low temperature polycrystalline silicon process on metal foils