Maarten van Drunen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Maarten van Drunen returned 2 record(s).

Number	Title
1	Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride
2	Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N2 Plasma on Planar and 3D Substrate Topographies