Inductively coupled plasma sources from Plasma ALD, LLC.


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Maarten van Drunen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Maarten van Drunen returned 2 record(s).

NumberTitle
1Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride
2Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N2 Plasma on Planar and 3D Substrate Topographies