Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Byung-Jin Cho Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Byung-Jin Cho returned 2 record(s).

NumberTitle
1Temperature control for the gate workfunction engineering of TiC film by atomic layer deposition
2Alloyed 2D Metal-Semiconductor Atomic Layer Junctions