Inductively coupled plasma sources from Plasma ALD, LLC.


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Meiling Li Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Meiling Li returned 3 record(s).

NumberTitle
1Growth of Gallium Nitride Films on Multilayer Graphene Template Using Plasma-Enhanced Atomic Layer Deposition
2PEALD-Grown Crystalline AlN Films on Si(100) with Sharp Interface and Good Uniformity
3Metallic indium segregation control of InN thin films grown on Si(100) by plasma-enhanced atomic layer deposition