Inductively coupled plasma sources from Plasma ALD, LLC.


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P. B. Kirby Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by P. B. Kirby returned 2 record(s).

NumberTitle
1Effects of Fast Neutrons on the Electromechanical Properties of Materials Used in Microsystems
2Effects of radiation and cryogenic temperatures on the electromechanical properties of materials used in microsystems