Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Robert Peter Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Robert Peter returned 2 record(s).

NumberTitle
1Residual chlorine in TiO2 films grown at low temperatures by plasma enhanced atomic layer deposition
2Investigation of residual chlorine in TiO2 films grown by Atomic Layer Deposition