Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Emmaline Kao Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Emmaline Kao returned 2 record(s).

NumberTitle
1ALD titanium nitride on vertically aligned carbon nanotube forests for electrochemical supercapacitors
2ALD titanium nitride coated carbon nanotube electrodes for electrochemical supercapacitors