Martin C. Schubert Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Martin C. Schubert returned 3 record(s).

Number	Title
1	Stability of effective lifetime of float-zone silicon wafers with AlO_x surface passivation schemes under illumination at elevated temperature
2	Light-induced activation and deactivation of bulk defects in boron-doped float-zone silicon
3	Electrical characterization of the slow boron oxygen defect component in Czochralski silicon