Massimo Tallarida Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Massimo Tallarida returned 3 record(s).

Number	Title
1	Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al₂O₃-films
2	Capacitance and conductance versus voltage characterization of Al₂O₃ layers prepared by plasma enhanced atomic layer deposition at 25°C<T<200°C
3	Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides