Pao-Hsun Huang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Pao-Hsun Huang returned 2 record(s).

Number	Title
1	Chemical Reaction and Ion Bombardment Effects of Plasma Radicals on Optoelectrical Properties of SnO₂ Thin Films via Atomic Layer Deposition
2	Effect of plasma power on the structural properties of tin oxide prepared by plasma-enhanced atomic layer deposition