Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Sasha Woodward-Gagné Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sasha Woodward-Gagné returned 1 record(s).

NumberTitle
1Tailoring angular selectivity in SiO2 slanted columnar thin films using atomic layer deposition of titanium nitride