Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Sang-Ick Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sang-Ick Lee returned 3 record(s).

NumberTitle
1Large-scale synthesis of uniform hexagonal boron nitride films by plasma-enhanced atomic layer deposition
2Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor
3Plasma-enhanced atomic layer deposition of hafnium silicate thin films using a single source precursor