Inductively coupled plasma sources from Plasma ALD, LLC.


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Scott W. Fong Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Scott W. Fong returned 2 record(s).

NumberTitle
1Steady-state Thermal Conductivity Measurement of Dielectric Stacks for Phase-Change Memory Power Reduction
2Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction