Inductively coupled plasma sources from Plasma ALD, LLC.


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Jaesung Jo Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jaesung Jo returned 1 record(s).

NumberTitle
1Plasma-Enhanced Atomic Layer Deposition of p-Type Copper Oxide Semiconductors with Tunable Phase, Oxidation State, and Morphology