Chia-Chi Tsai Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chia-Chi Tsai returned 2 record(s).

Number	Title
1	Enhanced electrical and reliability characteristics in HfON gated Ge p-MOSFETs with H₂ and NH₃ plasma treated interfacial layers
2	Electrical and physical characteristics of high-k gated MOSFETs with in-situ H₂O and O₂ plasma formed interfacial layer