Yu-Sen Jiang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yu-Sen Jiang returned 2 record(s).

Number	Title
1	Atomic Layer Densification of AlN Passivation Layer on Epitaxial Ge for Enhancement of Reliability and Electrical Performance of High-K Gate Stacks
2	Sub-7-nm textured ZrO₂ with giant ferroelectricity