Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

P. Gkotsis Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by P. Gkotsis returned 2 record(s).

NumberTitle
1Effects of radiation and cryogenic temperatures on the electromechanical properties of materials used in microsystems
2Effects of Fast Neutrons on the Electromechanical Properties of Materials Used in Microsystems