A. J. Kellock Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by A. J. Kellock returned 2 record(s).

Number	Title
1	Growth of cubic-TaN thin films by plasma-enhanced atomic layer deposition
2	Robust TaN_x diffusion barrier for Cu-interconnect technology with subnanometer thickness by metal-organic plasma-enhanced atomic layer deposition