Inductively coupled plasma sources from Plasma ALD, LLC.


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Yuren Xiang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yuren Xiang returned 1 record(s).

NumberTitle
1Oxidation precursor dependence of atomic layer deposited Al2O3 films in a-Si:H(i)/Al2O3 surface passivation stacks