Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Stefan De Gendt Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Stefan De Gendt returned 3 record(s).

NumberTitle
1Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides
2Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
3Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents