Inductively coupled plasma sources from Plasma ALD, LLC.


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W.-M. Li Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by W.-M. Li returned 1 record(s).

NumberTitle
1Plasma-Enhanced Atomic Layer Deposition (PEALD) of TiN using the Organic Precursor Tetrakis(ethylmethylamido)Titanium (TEMAT)