Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Jean-Pierre Vilcot Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jean-Pierre Vilcot returned 2 record(s).

NumberTitle
1Coupled used of SKP and C-V measurements to highlight the charge distribution and behavior in the Si/SiO2/Al2O3 stack for silicon solar cells surface passivation
2Impact of the firing step on Al2O3 passivation on p-type Czochralski Si wafers: Electrical and chemical approaches