Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

A. Farcy Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by A. Farcy returned 1 record(s).

NumberTitle
1Wideband frequency and in situ characterization of ultra thin ZrO2 and HfO2 films for integrated MIM capacitors