Ramasis Goswami Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ramasis Goswami returned 2 record(s).

Number	Title
1	Microstructure and Interfaces of Ultra-Thin Epitaxial AlN Films Grown by Plasma-Enhanced Atomic Layer Deposition at Relatively Low Temperatures
2	Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy