Inductively coupled plasma sources from Plasma ALD, LLC.


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Ramasis Goswami Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ramasis Goswami returned 2 record(s).

NumberTitle
1Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy
2Microstructure and Interfaces of Ultra-Thin Epitaxial AlN Films Grown by Plasma-Enhanced Atomic Layer Deposition at Relatively Low Temperatures