Inductively coupled plasma sources from Plasma ALD, LLC.


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Ruyue Yan Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ruyue Yan returned 1 record(s).

NumberTitle
1Improved Gate Dielectric Deposition and Enhanced Electrical Stability for Single-Layer MoS2 MOSFET with an AlN Interfacial Layer